abstract |
It is an object of the present invention to provide a cerium-based abrasive, which enables higher polishing speed and generates fewer scratches. The cerium-based abrasive according to the present invention contains rare earth oxide as a main component, which includes fluorine, and as rare-earth elements, at least cerium lanthanum, praseodymium, and neodymium. In the cerium-based abrasive, the proportion of content of neodymium oxide to that of the total rare-earth oxides (Nd2O3/TREO) accounts for 0.001-5.0 wt%. Polishing an object to be polished such as a glass by means of the abrasive will require shorter period of time compared to the conventional cerium-based abrasives. Additionally, the present abrasive can securely inhibit generation of scratches on a polished face. |