http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200425263-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-26 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00 |
| filingDate | 2003-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f531c54194e57119e178edbaa5c04c27 |
| publicationDate | 2004-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200425263-A |
| titleOfInvention | Phase shift mask and production method thereof and production method for semiconductor device |
| abstract | This invention discloses a phase shift mask for ultra-short ultraviolet ray capable of being actually constituted by properly combining the refractive index and absorption coefficient even if an ultra-short ultraviolet ray is reflected. A phase shift mask (10) comprising a reflection multi-layer film substrate (11), and a first region (12a) and a second region (12b) formed on the substrate (11) is formed by specifying the phase and reflectance of a reflection light of a ultra-short ultraviolet ray obtained from an arbitrary complex refractive index for a ultra-short ultraviolet ray and an arbitrary film thickness. Respective film thicknesses and complex refractive indexes of a formed film in the first region (12a) and a formed film in the second region (12b) are set based on the specified results, so as to produce a specified phase difference between the reflection light of a ultra-short ultraviolet ray in the first region (12a) and the reflection light of a ultra-short ultraviolet ray in the second region (12b). |
| priorityDate | 2002-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.