| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6723
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67011 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 |
| filingDate |
2003-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db8e577ab1634cee256978b79f00452b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75b3ebc09b627c97b2034d3408281cdc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7f7dc009bef366a76f72e642ff1a28a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d8cd3a7e6503704a1c01b969a34a1a3 |
| publicationDate |
2004-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200415262-A |
| titleOfInvention |
Multi-chemistry electrochemical processing system |
| abstract |
Embodiments of the invention generally provide an electrochemical processing system configured to provide multiple for a single plating process. The multiple chemistries are generally delivered to individual plating cells positioned on the processing system. The individual chemistries may generally be used to conduct direct plating on a barrier layer, alloy plating, plating with minimized defects, and/or any other plating process wherein multiple chemistries may be utilized to take advantages of the desirable of the desirable characteristics of each chemistry. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I552821-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9822464-B2 |
| priorityDate |
2002-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |