Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L23-0853 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L9-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L23-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 |
filingDate |
2003-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c5d56c6c033d9fd7b104c7056105aba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56001f6a1048383fd633d33d2ecd3cc3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_154218381b96f86f27c42b1cdfd446fe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91216d342d303480e3bf37e54fc8a5be http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_099cf4b00962d5d96e751f53dc918f62 |
publicationDate |
2004-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-200414965-A |
titleOfInvention |
Composition for polishing pad and using this polishing pad |
abstract |
An objective of the present invention is to provide a composition for polishing pad that is excellent in formability, abrasion resistance and small in temperature dependence of Young's modulus and using this polishing pad. The composition for polishing pad of the present invention comprises a water-insoluble matrix and a water-soluble particle dispersed in the water-insoluble matrix. The water-insoluble matrix contains a crosslinked ethylene-vinyl acetate copolymer and/or a crosslinked 1, 2-polybutadiene and each of these is contained by a prescribed amount against the total of the water-insoluble matrix. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I593511-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108687653-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10239182-B2 |
priorityDate |
2002-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |