| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
| filingDate |
2003-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d15e66b4617c59a6a83d13071be3c36 |
| publicationDate |
2004-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200413848-A |
| titleOfInvention |
Radiation sensitive resin composition |
| abstract |
A radiation sensitive resin composition and a transparent harden resin pattern formed by using the same are provided. The radiation sensitive resin composition includes: (A) a copolymer including (A1) constituent units derived from unsaturated carboxylic acid and (a2) constituent units derived from unsaturated composition with oxetanyl group, (B) quinonediazido composition and c cation polymerization initiator formed by the salt of hexafluoroantimonate anion and onium anion. Also a method for manufacturing the transparent harden resin pattern is provided. The radiation sensitive resin composition is coated, a predeterming deleloped pattern is formed by irradiate radetion through a mask, and then a radetion irradiation is performed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I450035-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I418931-B |
| priorityDate |
2002-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |