| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d7efdc1ce2d7474e9eff812bc73ee56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_952c79234747a9bb803da7d46b0a33c8 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2003-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f201deb6daa4839a894267b7181f24f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31f013764633217a56ba27c87bff0581 |
| publicationDate |
2004-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200413558-A |
| titleOfInvention |
Zirconium complex used for the CVD method and preparation method of a thin film using thereof |
| abstract |
In the preparation of a PZT thin film by the liquid source CVD method, using zirconium tetrakis(isobutyrylpivaloylmethanate) as a zirconium precursor enables to obtain a constant composition ratio of films within a wide range of the substrate temperature, and negates the need for the thermal treatment after the film preparation. Accordingly, the present invention provides a PZT thin film having a constant quality at a low cost. |
| priorityDate |
2002-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |