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filingDate 2003-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0753218c46835e9b576fdafda491dba6
publicationDate 2004-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200413522-A
titleOfInvention Washing liquid for semiconductor substrate
abstract The present invention provides a washing liquid for a semiconductor substrate having a pH of 6 to 12 and comprising a chelating agent and a chelate accelerating agent.
priorityDate 2002-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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