Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-264 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-361 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2034 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2072 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-261 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-36 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00 |
filingDate |
2003-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0753218c46835e9b576fdafda491dba6 |
publicationDate |
2004-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-200413522-A |
titleOfInvention |
Washing liquid for semiconductor substrate |
abstract |
The present invention provides a washing liquid for a semiconductor substrate having a pH of 6 to 12 and comprising a chelating agent and a chelate accelerating agent. |
priorityDate |
2002-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |