| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F24F3-167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24F7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24F3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F9-00 |
| filingDate |
2003-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_844e13aa8fb17c6b9c639f7f29eb1a5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_626bba8313da63c224680395284d5f6b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4f71db22891d69d390d2ba2d2280f0c |
| publicationDate |
2004-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200409891-A |
| titleOfInvention |
Contamination control method and apparatus, and air-conditioning system of a substrate processing facility employing the same |
| abstract |
A contamination control apparatus has a sprayer including at least one nozzle for spraying water, at least one eliminator having a passageway in which air is sprayed with the water to remove potential contaminants from the air, and a circulator for providing the sprayer with the water. The circulator includes a pH control device for adjusting the pH of the water fed to the sprayer, and an organic matter removing device for removing organic matter from the water. The contamination control apparatus can be advantageously employed in an air-conditioning system of a substrate processing facility. |
| priorityDate |
2002-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |