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filingDate 2003-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_040508c651f0d0148cc9881dca9b1a7b
publicationDate 2004-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200409226-A
titleOfInvention Surface treatment method, semiconductor device, manufacturing method for the semiconductor device, and the processing device for the same
abstract The present invention provides a surface treatment method to form the surface with structures using super-critical fluid 4 processing, which is characterized in adding ammonium hydroxide, an alkanolamine, a fluoroamine, hydrofluoric acid as the solvent agent 5; and, adding surfactant material in the super-critical fluid 4 except the solvent agent 5; and, the surfactant 6 may use the polarized solution. Thus, the present invention can provide the surface treatment method for firmly removing the residuals only by using the super-critical fluid processing.
priorityDate 2002-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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