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filingDate 2003-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c550c15ca38c1ffce79f27185d261209
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publicationDate 2004-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200408057-A
titleOfInvention Manufacturing method of mounting body, semiconductor device and mounting body
abstract The objective of the present invention is to provide a manufacturing method to reduce the grounding impedance of mounting body. It comprises: the engineering to form semiconductor device in the plural semiconductor chip regions on the main surface of the semiconductor substrate, and the grounding pad 11 of the grounding wiring in the semiconductor device; the engineering to form the separation groove 32 physically in the separation region of the plural semiconductor chip regions for separation; the engineering to form the grounding metal layer 26 in the separation groove 32 to connect to the grounding pad 11 of the semiconductor device; the engineering to polish the back side of the semiconductor substrate till exposing the bottom of the separation groove, and separate the plural semiconductor chip regions into individually independent semiconductor chips 21; the engineering to form conductive material at the ground location on the surface installed on the mounting substrate; and the engineering to connect the metal layer 26 and ground through conductive material for carrying the semiconductor chip 21.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10916508-B2
priorityDate 2002-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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