| abstract |
This invention pertains to complex mixtures of the formula M is metal having a valence of from 2-6, L1 is an anionic ligand and L2 is a siloxide or silyl amide ligand suited for producing stable thin-film metal silicates, v is equal to the valence of the matal, and 0 < x < v. The bonding is such that an M-O-Si or an M-N-Si linkage exists, respectively, and the stability for the complex is provided by the organic ligand. The invention also relates to a process for preparing the metal siloxide complexes. Thus, the complexes can be represented by the formulas (R)mM-(O-Si R1R2R3)n and (R)mM-[N-(SiR1R2R3)y(R4)2-y]n wherein M is a metal having a valence of 2-6, m and n are positive integers and m plus n is equal to the valence of the metal M. The R type groups, i.e., R, R1, R2, R3, and R4 represent an organo ligand. |