http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200401663-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e8ba6870e42607109689c74072ca5d3 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A63B2102-32 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A63B55-406 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A63B55-404 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A63B55-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A63B55-408 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-14 |
| filingDate | 2003-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63380385f24fe44e496da01ef0701087 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cb3ec7524060977a2d29acc0a4bdd98 |
| publicationDate | 2004-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200401663-A |
| titleOfInvention | Cleaning agent containing gas of nitrogen fluoride and cleaning method |
| abstract | The present invention provides a cleaning agent and cleaning method characterized in that can be easily stored, used in the air for cleaning the gas of nitrogen fluoride containing nitrogen trifluoride etc., and run-away of heat due to diluting gas types during cleaning, or the violent exothermic reaction and harming gas would not be carried out. Additionally, the pressure loss of the cleaning tube would not be increased or closed, which can effectively clean the gas containing nitrogen fluoride without exhaustion of NOx. The cleaning agent comprises stannous oxide and at least one compound as effect ingredient which is selected from the group consisting of oxide, hydroxide, carbonate of alkali metal, and oxide, hydroxide, carbonate of lanthanon. Furthermore, the clean can be carried out when the gas containing nitrogen fluoride contacting the cleaning agent under heating. |
| priorityDate | 2002-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 66.