http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200401329-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1303 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 |
| filingDate | 2003-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3aee7e30c16981e32ebfdae8c336c980 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae5e28263aa36a0ee89fd71c0311295f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d46a0e0836a5115d266501eb762c00c6 |
| publicationDate | 2004-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200401329-A |
| titleOfInvention | Solution treatment method and solution treatment unit |
| abstract | The present invention is a solution treatment unit, supplying the treatment solution onto the substrate, which comprises a carrier path for carrying the substrate in the horizontal direction keeping its posture nearly horizontal, and a solution treatment part wherein the pre-determined treatment solution is supplied onto the substrate at the carrier path, and single or plural vapor jet nozzle and a drying process part wherein the vapor is blown to the substrate at the lower side than the solution treatment part of the carrier path to purge the liquid from the substrate. The present invention can prevent the stain, dregs, watermark etc. from occurring on the surface of the substrate after the drying process. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I462210-B |
| priorityDate | 2002-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.