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publicationDate 2003-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200304941-A
titleOfInvention Composition of etching liquid
abstract There is the composition of etching liquid, which includes perfluoroalkyl phosphorous acid compound, oxalic acid, and water.
priorityDate 2002-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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