| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_950bce8d103dab1bd282965fde47f9f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K1-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K1-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K1-14 |
| filingDate |
2003-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_adc7ab0108707e3714c7d16b8709d43e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8255cfcb0e23645f079e6eb7d8f58c7 |
| publicationDate |
2003-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200304541-A |
| titleOfInvention |
Contact temperature probe and process |
| abstract |
A contact measurement probe for measuring a temperature of a substrate in a process environment includes a probe head having a contact surface made of a ceramic material or a polymeric material for contacting the substrate. The contact measurement probe eliminates electrical biasing effects in process environments that include an ion source, thereby providing greater accuracy and reproducibility in temperature measurement. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102095513-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102095513-B |
| priorityDate |
2002-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |