| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f306de9db588c8df5ad7a29a5b0d4fe7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6166fd95a23a202956be801ffaff753f |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
1977-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1979-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5fbfc0ed7d668050f467495b64d4031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e59e8333790988497d7b10580504d86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8f097eb072b5e36ee15ac0c61789f84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f940653ca594b8c6f23752a84c2e175 |
| publicationDate |
1979-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
SU-632269-A1 |
| titleOfInvention |
Method of electropytic etching of gallium phosphide |
| priorityDate |
1977-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |