http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SU-1578901-A1
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4765b915acd619bf7c183bb72a5ab1f5 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F33-80 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01F13-10 |
filingDate | 1986-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1991-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d538ac1c12be1f8a5d3b62aefd31e761 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98b75b79e5f02145c055b4ea173729f1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49861175cf8ec984400f6961400cd8fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4cd05bd2acea22c389a76db98b68d198 |
publicationDate | 1991-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | SU-1578901-A1 |
titleOfInvention | Installation for producing glass - like hydroxide material from multicomponent solution ,particularly, for protecting semiconductor devices |
abstract | The invention relates to the instrumentation of the processes for producing protective coatings of semiconductor devices from the effects of the environment. It provides an improvement in the quality of the finished product by increasing the degree of homogenization. The apparatus for producing vitreous hydrooxide material from a multicomponent solution contains a frame on which vessels I, 2, tanks 3, 4 with paddle agitators 14 are mounted. Chamber 12 is designed to mix reagents from vessels 1 and 2. Chamber 12 is made in the form of an inverted a cup, in the cavity of which two capillary tips are set obliquely at an angle of 20-25 & and 10-15 °, 1.5-2 mm in diameter, while the opposite wall of the chamber 12 is made flat vertical and at the bottom is equipped with a ledge 5-6 mm wide. Chamber 12 is placed on the lid 11 of the collection tank 5, which is installed with tilting, and the collection tank is mounted so that it can be moved by the roller table 6 to the thermocamera 8, to evaporate the gel to a powder. Mixer 14 in the collection tank is located under the ledge of the mixing chamber. A zp f-ly, 3 ill. with $ (L with sa j eo Ј |
priorityDate | 1986-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.