http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SU-1308830-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a876497fc0f46f81ba3ef37e4633c375 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 |
| filingDate | 1985-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1987-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f2e92ee4eb900472ccc78f440a1aee8 |
| publicationDate | 1987-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | SU-1308830-A1 |
| titleOfInvention | Device for checking thickness of thin film |
| abstract | The invention relates to a measuring tehpike and can be used in the optoelectronic and rdote.conicon industry of a non-contact non-destructive congruence and refractive index of thin films on (yudku. Purpose of the invention - an increase in accuracy / yy |, sh. 1 by excluding the fungus. ") neither how) didn’t result from the scattering of 1 ad) or opti m n reflected1O radiations. The device is made of tea and a tea tract consisting of up to. . 1 short 1 are located on the source of I linearly, 1 is the radiation of the 1st radiation. Bjianiatete.p 2 polarization planes, a receive1 1Y path, states of the analyzer 3 in series and the radiation receiver 4, the prefix of the disturbed total internal reflection, the fifth of the successively arranged flat mirrors 5 and 6, of the semi-cylindrical press 7 In addition, a spherical mirror 8 and a flat mirror 9. The controlled image I) is a film deposited on a spoon. 1 il. (O oo oo 00 co o |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2491533-C1 |
| priorityDate | 1985-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.