| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2c78d80e9d323ad7c79518c80e0b8d16 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-165 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 |
| filingDate |
2001-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_713e8172026b911d7126576ceae1f7e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58bcb19fce38cad90b7073068c7aca03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd7760a952cee6287bc780ab648cce71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3180dc744b8142b02f681cbb24e85de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c47eea5f2aa8b86859cb3496330b52ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c94f47025db033ac86c0e4e510eb29f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8ad1c5c2068bf2bc7b68a88e6f31668
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f63e86d0eb8679ee58bdbe9bb713ac3 |
| publicationDate |
2003-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
SG-95662-A1 |
| titleOfInvention |
Method of copper transport prevention by a sputtered gettering layer on backside of wafer |
| priorityDate |
2000-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |