| abstract |
METHOD OF ROOM TEMPERATURE COVALENT BONDINGA method of bonding includes using a bonding layer having a fluorinatedoxide. Fluorine may be introduced into the bonding layer by exposure to a fluorine-containing solution, vapor or gas or by implantation. The bonding layer may also beformed using a method where fluorine is introduced into the layer during itsformation. The surface of the bonding layer is terminated with a desired species,preferably an NH[err] species. This may be accomplished by exposing the bondinglayer to an NH[err]OH solution. High bonding strength is obtained at roomtemperature. The method may also include bonding two bonding layers together andcreating a fluorine distribution having a peak in the vicinity of the interface betweenthe bonding layers. One of the bonding layers may include two oxide layers formedon each other. The fluorine concentration may also have a second peak at theinterface between the two oxide layers.Figure 1 |