http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-185033-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d134eb79512ea6464bb92963fc5bb6f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B44C1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 |
| filingDate | 2011-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d260ed63bd0a6c4d87a14284b3075d3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f45c08298a6d6bf1f0b78c1d4f817f83 |
| publicationDate | 2012-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | SG-185033-A1 |
| titleOfInvention | Sapphire polishing slurry and sapphire polishing method |
| abstract | Disclosed is a polishing slurry for sapphire polishing that is capable of obtaining polishing speeds and smooth surfaces during the polishing of sapphire substrates that are equivalent to or better than in prior polishing processes even if the number of polishers and polishing hours are reduced. Also disclosed is a sapphire substrate polishing method. The slurry includes alumina abrasives and has a pH adjusted to the range of 10.0 to 14.0, and the sapphire is polished by means of the CMP technique by applying said slurry. The aforementioned alumina abrasives more preferably include at least α-alumina, and the content thereof is more preferably 0.01 to 50 wt%. The mean particle size of the aforementioned alumina abrasives is preferably 0.05 to 10 μm. |
| priorityDate | 2010-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226 |
Total number of triples: 18.