http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-182133-A1

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filingDate 2011-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31403ffa437441bf6741505737c45a3a
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publicationDate 2012-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber SG-182133-A1
titleOfInvention Sulfonium compound, photo-acid generator, and method for manufacturing the same
abstract 71 SULFONIUM COMPOUND, PHOTO-ACID GENERATOR, AND METHOD FOR OF THE DISCLOSUREA sulfonium compound represented by formula (I), a photo-acid generator, and a method for producing a sulthnium compound are provided:[Chemical Formula 1] R4+ -Awherein X represents an electron-donatinggroup; R1 and R2 each represent an alkyl group, a cycloalkyl group, or the like; R3 and R4 each represent an arylene group or aheteroarylene group; R5 and R6 each represent an alkyl group, a cycloalkyl group, or the like; and AI and EY are anions that are different from each other. The sulMniumcompound, when used as a photo-acid generator, can produce a uniform and excellent resist pattern.
priorityDate 2011-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 28.