http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-177418-A1

Outgoing Links

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e0bf0928b608797b70bbc2b91c7e52e
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
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filingDate 2010-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b056dd29b3d47305039012674a17c80c
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publicationDate 2012-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber SG-177418-A1
titleOfInvention Composition for metal plating comprising suppressing agent for void free submicron feature filling
abstract A composition comprising at least one source of metal ions and at least one additive obtainable by reacting a polyhydric alcohol comprising at least 5 hydroxyl functional groups with at least a first alkylene oxide and a second alkylene oxide from a mixture of the first alkylene oxide and the second alkylene oxide or a third alkylene oxide, a second alkylene oxide, and a first alkylene oxide in aforesaid sequence, the third alkylene oxide having a longer alkyl chain than the second alkylene oxide and the second alkylene oxide having a longer alkyl chain than the first alkylene oxide.
priorityDate 2009-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
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Total number of triples: 21.