| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2c23d6f365f083e276a7b146591db3cf |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2019-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd64de1e5a3e8743dd09323064595780
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b3bdd664bf1f205b3a86a56b6dc86af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b95b586cac78b906e2ee23e5027b7cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_402b0e214bcb5b6debc235ac395b5b95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db5d2c97404fdf0e3b13e4f24417c833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_016782c8ea80ad28b0e63cdc9f056873 |
| publicationDate |
2021-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
SG-11202101348V-A |
| titleOfInvention |
Silanol-containing organic-inorganic hybrid coatings for high resolution patterning |
| priorityDate |
2018-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |