| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67086 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate |
2018-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_881a594eb62f1019a73ff90e7d97c866
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a61744dca80a0aa1bef6b634291b283e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a2078cb92ec088d5d9d9e19652c03e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4609c856af3595fc8e9bce804f89efc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e717765432a1c0ddadfd7c5059818ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8d1709d5307f1f3bff598de42c5fead
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_965e5185c0a54b8792327147bc0eeb8c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_850d265185855100ec41c8b223804a33 |
| publicationDate |
2020-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
SG-11202001854V-A |
| titleOfInvention |
Compositions and methods for etching silicon nitride-containing substrates |
| priorityDate |
2017-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |