| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| filingDate |
2020-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bc5c170dec153c522d766d02bf0798e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43b2dcd490789b9cfff11b4815abd577
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ece16748c81b6016af84930300a13d7c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79ae9e73997676dab89706fc2cbad2f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f86ae2b8d75beaa00c002da048dd022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f44e097d4ed6d657b218a2845a770acd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63b6f740a64950b18771dc9761808802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4324f80a731caeeace1ffc5738a1f779
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79ea05b2632966cee8022878c6fa7ba7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecbe40c16ba16064171d8459c8df762b |
| publicationDate |
2020-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
SG-10202000680T-A |
| titleOfInvention |
Etchant composition for silicon nitride layer |
| priorityDate |
2019-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |