| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f3801683ff7d88906e193527090a838a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 |
| filingDate |
2014-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbbd7fb887ec1b6fa4f1be9edc299aca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8cd58cdfbeff18002c80531402e3517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2df6e573d7b201347adf4678fa089211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b067d38887c0d39bc42ed36919d652c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e18c14a5c18952f07cfb5b0f0b70057d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b6a9018648afde931bce58e19a339c6 |
| publicationDate |
2018-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
SG-10201801575Y-A |
| titleOfInvention |
Compositions and methods for selectively etching titanium nitride |
| priorityDate |
2013-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |