http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SA-521421323-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b1962bdeafe58e2f312c308fe511c31 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-03 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2059 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| filingDate | 2021-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3378f56305dfb5b227db0ddc98cd3a8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5feabf3c26d92190f71e85ea49ebbcb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70cd51ca5d53dd73197594a2e9417879 |
| publicationDate | 2022-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | SA-521421323-B1 |
| titleOfInvention | Fabrication of calcite nanofluid channels |
| abstract | The present invention relates to a method for fabricating calcite channels in a nanofluidic device. A photoresist layer is coated on top of a silicon nitride (SiN) substrate. After the photoresist layer is coated, the photoresist layer is scanned with an electron beam in a predetermined pattern. The scanned photoresist was developed to expose portions of the upper surface of a SiN substrate in the predetermined pattern. Calcite is deposited in the predetermined pattern using atomic layer deposition (ALD) using a calcite generator gas. Using a solvent, the remainder of the photoresist layer is removed to expose the deposited calcite in the predetermined pattern and on the top surface of the SiN substrate, where the width of the deposited calcite varies from 50 to 100 nanometers (nm). Figure 1. |
| priorityDate | 2018-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.