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filingDate 2017-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9daa6ed6134dd92606ed35279a581b67
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publicationDate 2018-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber RU-2666784-C1
titleOfInvention Matrix auto emission cathode and method for manufacture thereof
abstract FIELD: electrical engineering. n SUBSTANCE: invention relates to devices of solid-state and vacuum electronics, in particular, to auto-emission elements based on the Si-SiC-graphene system used as cathodes: to diodes, to triodes and to devices based on them. Matrix auto-emission element with cathodes based on the Si-SiC-graphene system includes a single-crystal silicon substrate on the front surface of which a cathode unit is formed in the form of multi-point emission structures having the shape of a cone, at the tip of the emission structure, films of underlying silicon carbide and graphene are formed, a contact layer formed on the reverse surface of the semiconductor substrate consisting of an adhesive layer located on the reverse surface of the semiconductor substrate and a current-carrying layer disposed on the surface of the adhesive layer. n EFFECT: increase in the current of the field emission and the time stability of this quantity, a reduction in the operating voltages in vacuum microelectronics devices based on carbonaceous materials and, as a result, the extension of their service life. n 2 cl, 4 dwg
priorityDate 2017-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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