Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_129e5e35a66e8fff98e3c3e81aa6b97c |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-203 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 |
filingDate |
2015-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2017-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6884be9b4c21333cbccb6ea90f0778f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_545226f82c232a914c00c425f1c80e62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e82a7313b7f1c1a47a87286ae98eea79 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6dac405ab17385bb935f4923d4fe073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_308d2c308715ad8abf29155fabd20fe0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd0642038e6d6c30d640cefd87d85086 |
publicationDate |
2017-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
RU-2609764-C1 |
titleOfInvention |
Method for producing amorphous films of chalcogenide glass-based semiconductors with phase memory effect |
abstract |
FIELD: chemistry. n SUBSTANCE: used bismuth modified chalcogenide semiconducting material of Ge 2 Sb 2 Te 5. The said material is mechanically activated. Carried out non-equilibrium high-frequency ion-plasma deposition of material in the gas mix of argon and hydrogen at a ratio of 90:10. Material deposited on a dielectric layer in medium vacuum at a pressure between 0.5 to 1.0 Pa and radio-frequency voltage range of 400 to 470 V. n EFFECT: increase of information transfer speed and reduction of power intake. n 1 ex |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EA-033412-B1 |
priorityDate |
2015-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |