http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2472704-C1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e0aba82e45c159c48693c8268c3c1f6d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-107 |
| filingDate | 2011-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_279d3108cb35710b174f21daf92a39b0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a9657b420957811bd890cdfd2d09a5a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f71b748beab4db1a78a3d51d79e434f2 |
| publicationDate | 2013-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | RU-2472704-C1 |
| titleOfInvention | Method for catalytic hydrogenation of silicon tetrachloride |
| abstract | FIELD: chemistry. n SUBSTANCE: invention relates to production of silicon-containing materials which are used in production of semiconductor silicon. The method involves catalytic hydrogenation of silicon tetrachloride with subsequent separation of reaction products, wherein the catalyst used is chlorides of transition metals or mixtures thereof; hydrogenation is carried out at temperature not lower than 200°C, preferably at 300-350°C, and the formed reaction products are cooled to temperature not higher than 100°C. During the process, formed chlorosilanes are removed from the mixture of products, and unreacted silicon tetrachloride and hydrogen are returned into the process cycle, which enables to increase conversion of silicon tetrachloride to 100%. n EFFECT: method is energy-saving owing to hydrogenation of silicon tetrachloride at low temperature with sufficiently high conversion of silicon tetrachloride of about 75-90%. n 3 cl, 9 ex |
| priorityDate | 2011-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.