abstract |
FIELD: chemistry. n SUBSTANCE: invention can be used in microelectronics industry. To obtain zirconium titanates, zirconium compounds react with titanium dioxide particles, having BET specific surface area greater than 200 m 2 /g. To obtain lead-zirconium titanates, lead and zirconium compounds react with titanium dioxide particles with BET specific surface area greater than 200 m 2 /g. Content of halides in the titanium dioxide particles used is less than 1000 parts per million in terms of TiO 2 . The lead-zirconium titanates are ground and then pressed to form green moulds or processed into a film, after which they are sintered to obtain microelectronic articles. n EFFECT: invention enables to obtain finely dispersed, well sintered zirconium titanates or lead-zirconium titanates. n 47 cl, 11 ex |