http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2405857-C2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_503a7b37361a78c56ed02fa614cf5116 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2008-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68ccdc98a3297d8928ff502d6d850506 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddd150f8f915ba84a8db458f29012f73 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b24e0345d7966d4c7f1257266a475c4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c6dd448a0b4a464284265f0eee8596e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_128c4ff902ac965b3cc8213f76c2c80d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28eeed7b360e41cc618395392f9f92bf |
| publicationDate | 2010-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | RU-2405857-C2 |
| titleOfInvention | Method for obtaining oriented fluoride coatings from gas phase |
| abstract | FIELD: metallurgy. n SUBSTANCE: method for obtaining oriented fluoride coatings by method of chemical deposition from vapour phase involves arrangement of bottom layer in deposition zone of chemical deposition reactor at temperature of 250-400°C, deposition of fluoride coating on the bottom layer by mixing the flow of metal-organic compounds which are evaporated within temperature range of 150-300°C and pressure of 1-20 mbar, and fluoride-forming flow. As metal-organic compounds there used are volatile metal-organic compounds not containing fluor. Fluoride-forming flow is generated from solid precursor as a result of its evaporation directly in chemical deposition reactor at temperature of 50-120°C from solid precursor, and acid nonorganic bifluoride is used as precursor. Flow of metal-organic compounds and fluoride-forming flow is supplied to deposition zone either with counter-flow, or by coaxial introduction of flows in the inert gas flow. n EFFECT: range of used bottom layers and metal-organic reagents is enlarged, corrosion of equipment is eliminated at performing this method, protection of the obtained coatings is provided against oxidation, temperature of the process performed decreases and cost of the obtained coatings is reduced. n 6 cl, 2 dwg, 4 ex |
| priorityDate | 2008-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.