abstract |
FIELD: process for forming of ceramic coats on substrates and manufacture of targets as sources for effectuation of such coating process, may be used for producing of metal articles from super alloys, such as gas turbine vanes or guiding devices having thermal barrier coating. n SUBSTANCE: method involves locating target 20 formed as rod in chamber 14, said rod being formed from ceramic powdered materials and having non-homogeneous composition in longitudinal direction; introducing at least one substrate 10 on surface of which substrate ceramic coat having composition gradient is to be applied; scanning upper surface of rod using electron beam in order to cause melting of rod material on its upper surface and formation of vapor cloud in chamber under reduced pressure; using rod 20 comprising a plurality of superposed layers, with composition within each of said layers being homogeneous throughout the entire cross section of rod. Each layer contains zirconium dioxide and at least one oxide selected from the group comprising oxides of nickel, cobalt, iron, yttrium, hafnium, cerium, lanthanum, tantalum, niobium, scandium, samarium, gadolinium, dysprosium, ytterbium, and aluminum. n EFFECT: provision for producing of coat with composition gradient throughout the thickness for one continuous cycle. n 12 cl, 6 dwg, 2 ex |