http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2033658-C1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_27a69080ffbfd1d8c0b8009ea3ccc64c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 1993-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1995-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0ad2487007d7488745f1989d30c843d |
| publicationDate | 1995-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | RU-2033658-C1 |
| titleOfInvention | Etching agent for chemical smoothing of substrates of cadmium telluride |
| abstract | FIELD: semiconductor devices. SUBSTANCE: etching agent includes following components, per cent by mass: chrome oxide 2.0-15.0; sulfamic acid 10.0-20.0; water being the balance. EFFECT: expended range of application of etching agent. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2627711-C1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2619423-C1 |
| priorityDate | 1993-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.