http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2011144618-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-423 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-38 |
| filingDate | 2010-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | RU-2011144618-A |
| titleOfInvention | COMPOSITION FOR APPLICATION OF A METAL COATING CONTAINING A SUPPRESSIVE AGENT FOR FULLY FILLING OF SUBMICRON SURFACE ELEMENTS |
| abstract | 1. Composition containing a source of metal ions and at least one suppressing agent, which is obtained by the reaction of: a) an amine compound containing active functional amino groups, cob) a mixture of ethylene oxide and at least one compound selected from C3 and C4 alkylene oxides, where said suppressing agent has a molecular weight (M) of 6000 g / mol or more, and wherein the ethylene oxide content of the copolymer of ethylene oxide and C3-C4 alkylene oxide is 30 to 70%. 2. The composition according to claim 1, characterized in that the molecular weight (M) of the suppressing agent is from 7000 to 19000 g / mol. The composition according to claim 2, characterized in that the molecular weight (M) of the suppressing agent is from 9000 to 18000 g / mol. The composition according to claim 1, characterized in that the metal ions contain copper ions. The composition according to claim 1, characterized in that the amine compound containing active functional amino groups contains at least 3 active amino groups. The composition according to claim 1, characterized in that the suppressing agent is selected from compounds of the formula I: where - each radical R is independently selected from a copolymer of ethylene oxide and at least one more C3-C4 alkylene oxide, said copolymer being a random copolymer, - each radical R is independently is selected from R or alkyl, preferably C1-C6 alkyl, - X and Y independently represent spacer groups, where X has independent meanings for each repeating unit selected from C1-C6 alkylene and Z- (OZ) m, where each radical Z independently is selected from C2-C6 alkylene, n is an integer greater than or equal to 0, m is an integer greater than or equal to 1.7. Lump |
| priorityDate | 2009-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.