http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2009131534-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2418 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-471 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32366 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-471 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2418 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| filingDate | 2008-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | RU-2009131534-A |
| titleOfInvention | DEVICE FOR PLASMA PROCESSING |
| abstract | 1. A device for plasma treatment for treating an object to be treated by activating a plasma-forming gas with an electric discharge, followed by pushing the activated plasma-forming gas onto an object to be treated, wherein the device for plasma treatment comprises:! a coated electrode formed by embedding a conductive layer in an insulating substrate made of a ceramic sintered body; ! an electric discharge space formed between a plurality of coated electrodes located opposite each other; and! a power supply for causing an electric discharge in the electric discharge space by applying a voltage to the conductive layers. ! 2. The plasma treatment device according to claim 1, in which the coated electrodes are arranged so as to create electric field lines in a direction transverse to the direction in which the plasma-forming gas passes in the electric discharge space, wherein the electric field lines are created in the electric space. discharge by applying a voltage to the conductive layers. ! 3. The plasma treatment device of claim 1, wherein the coated electrodes are positioned to generate electric field lines in a direction substantially parallel to the direction in which the plasma gas travels in the electric discharge space, wherein the electric field lines are generated in space of an electric discharge by applying a voltage to |
| priorityDate | 2007-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717 |
Total number of triples: 20.