http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2007148502-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate | 2006-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | RU-2007148502-A |
| titleOfInvention | DEVICE AND METHOD FOR APPLYING COATING ON SUBSTANCE |
| abstract | 1. A device for coating a substrate using physical vapor deposition, comprising a vacuum chamber containing a coil for holding a certain amount of conductive material in a levitating state and for heating and vaporizing this material when using alternating electric current in the coil, and in means for insulating the coil from the levitated material are arranged in the coil, characterized in that the insulating means are part of a container made of a non-conductive material, and the container has one or more holes for directing the evaporated conductive material to the substrate to be coated. ! 2. The apparatus of claim 1, wherein the container is in the form of a pipe that has plugs at both ends, wherein the plug has one or more openings. ! 3. The apparatus of claim 1, wherein the container is in the form of a pipe with a plug at one end and a box-like protrusion at the other end, the protrusion having a plurality of holes. ! 4. The device of claim 3, wherein the projection is at least the same width as the substrate to be coated. ! 5. A device according to any one of claims 1 to 4, wherein the openings are in the form of holes or slits. ! 6. Apparatus according to any one of claims 1 to 4, wherein the container is provided with heating means for heating the container. ! 7. The apparatus of claim 6, wherein the container is provided with heating elements made of a conductive material such as molybdenum or tungsten high resistance wire. ! 8. A device according to any one of claims 1 to 4, wherein the container is made of a ceramic material such as boron nitride or silicon nitride. ! 9. Method |
| priorityDate | 2005-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.