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filingDate 2003-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d62fcbc90ae0d6ef66d3deae95929db8
publicationDate 2007-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber RS-106104-A
titleOfInvention MICROELECTRONIC COMPOSITIONS FOR ARC CLEANING AND REMOVAL
abstract Cleaning compositions, suitable for cleaning microelectronic structures having silica, low k-value or high k-dielectrics and copper or aluminum metallization, contain one polar organic solvent selected from amides, sulfones, sulfolenes, selenones and saturated alcohols and one strongly alkaline base.
priorityDate 2002-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 33.