| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ae0412e72f24b7aea064b1505c6cc11c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-169
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-935
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-11 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-0289
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F23C15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45523
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J4-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45561 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J4-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01L99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
1987-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1989-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
NL-8702096-A |
| titleOfInvention |
METHOD AND APPARATUS FOR MIXING GASES AND EPITACTICALLY MANUFACTURING SEMICONDUCTOR PRODUCTS USING A GAS MIXTURE |
| priorityDate |
1987-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |