http://rdf.ncbi.nlm.nih.gov/pubchem/patent/NL-2029319-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_375e56c930a010a3edfedac830bb8bb1 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2021-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1036923f0f2615cd699ee65e0db1a761 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47dc50ee0e1ef16e3da37a922da6e4ce |
| publicationDate | 2022-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | NL-2029319-A |
| titleOfInvention | Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method |
| abstract | A target supply device may include a tank configured to store a target substance, a pressure adjuster configured to adjust a pressure in the tank, a filter configured to filter the target substance in the tank, a nozzle configured to output a droplet of the target substance having passed through the filter, a droplet detector configured to detect outputting of the droplet from the nozzle, and a processor configured to control the pressure adjuster so that a pressure—increasing speed of the pressure in the tank is higher after detection of outputting of the droplet than before detection of outputting of the droplet, during a period in which the pressure in the tank is increased to a target pressure from a pressure at which outputting of the droplet is detected by the droplet detector for the first time after installation of the target supply device. |
| priorityDate | 2020-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578766 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123161 |
Total number of triples: 16.