http://rdf.ncbi.nlm.nih.gov/pubchem/patent/NL-2015885-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
filingDate 2015-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eeb3ed8cc023b9fa731d98e71f0d9d7f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_272147d2527c0b116b0cf9211dbd6a85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c8de589d0937d82ebb47294b2692961
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e860ff020c9ce7df1824ed527c4743f
publicationDate 2016-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber NL-2015885-A
titleOfInvention Lithographic patterning process and resists to use therein.
abstract A resist composition is disclosed which comprises a perovskite material with a structure having a chemical formula selected from ABX3, A2BX4, or ABX4 , wherein A is a compound containing an NH3 group, B is a metal and X is a halide constituent. The perovskite material 5 may comprise one or more of the following components: halogen-mixed perovskite material; metal-mixed perovskite material, and organic ligand mixed perovsikte material.
priorityDate 2014-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524278
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448237845
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID644041
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546359
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14784
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID44146497
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3468413
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419540001
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407607723
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3427831
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524988
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91501
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320

Total number of triples: 37.