http://rdf.ncbi.nlm.nih.gov/pubchem/patent/NL-2014094-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate | 2015-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c69f360583b76f606fe888df4f4fe1d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a340b51411f8cc96f4838f96c0e1624 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f2a6829ef10abf0c521a5f35e685532 |
| publicationDate | 2015-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | NL-2014094-A |
| titleOfInvention | A lithographic apparatus, radiation source, and lithographic system. |
| priorityDate | 2015-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.