| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bd9a0f38158c4e4e98a1a13bdda45158 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7076
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-708 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2010-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b09bf58e7ea369323a8ac0114c1dfe80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03a6bc0ef7b8a1f9182744a4bf451d08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b4399f1f5b5f49d0c748b08b4a21213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a14155c124c60329637a18f100eb8eda
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fdd37e27ab490d45361a4500ab5da76 |
| publicationDate |
2010-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
NL-2004365-A |
| titleOfInvention |
Method and system for increasing alignment target contrast. |
| priorityDate |
2009-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |