http://rdf.ncbi.nlm.nih.gov/pubchem/patent/NL-2001209-C2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0d4c86e27dacbae07234cec1a12ef584 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate | 2008-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d00e34368e1ec14eb26307a222e29df4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a6bdc3c19a35167c9aa9f8109a464bb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebae93bd3af82235ca2f034b08c7515e |
| publicationDate | 2011-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | NL-2001209-C2 |
| titleOfInvention | DEVICE AND METHOD FOR GENERATING EXTREMELY ULTRAVIOLET RADIATION BY ELECTRICALLY OPERATED GAS DISCHARGE. |
| abstract | The object of an arrangement and a method for generating extreme ultraviolet radiation by an electrically operated gas discharge is to improve the adjustment of the layer thickness and, in particular, to prevent an uncontrolled accumulation of the metal layer to be applied to the rotary electrodes during pauses in the pulse operation for generating radiation when, e.g., liquid flows through these rotary electrodes for efficient cooling. In this connection, the rotating speed of the rotary electrodes can be increased in particular until there is always a freshly coated surface region of the electrodes in the discharge area at repetition frequencies of several kilohertz. An edge area to be coated on at least one electrode has at least one receiving area which extends in a closed circumference along the electrode edge on the electrode surface and which is formed so as to be wetting for the molten metal. A coating nozzle for regenerative application of the molten metal is directed to this receiving area and has a shutoff valve connected to a valve regulating device. |
| priorityDate | 2007-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.