patent/NL-1040348-A

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assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f115214a8539f6c1ff729bf3f08e742c
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B21-086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B21-02
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
filingDate	2013-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed7cbd0d1d7f097f8d6cd39f3d67104e
publicationDate	2015-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	NL-1040348-A
titleOfInvention	Drying device for use in a lithography system.
priorityDate	2013-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID27722 http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID27722 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID727 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554239

Total number of triples: 19.