| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d69445b2bef2798628ddc9a3f83d0174 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0127 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-48721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B1-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B1-00 |
| filingDate |
2003-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4fd8e87b8a4d1470416261b22c531ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3400ebdd9c9336476c7998578a60abf6 |
| publicationDate |
2004-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
NL-1022855-C2 |
| titleOfInvention |
Method and device for the controlled manufacture of openings on a nanometer scale. |
| priorityDate |
2003-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |