http://rdf.ncbi.nlm.nih.gov/pubchem/patent/MY-185758-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_262f3449e63b1dd293e54a7de93c9173 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
| filingDate | 2012-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f85403fc4d2cd9bc6691497c8af91b0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f846ec3567948f10478c5c322afa3a58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee3c34f07b859c9926d688d4ad23be59 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd5787bac647c2f4532373d1f947895b |
| publicationDate | 2021-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | MY-185758-A |
| titleOfInvention | A method of fabricating a gas sensor |
| abstract | A method of fabricating a gas sensor with a conductive sensing element on a microhotplate (102) is provided, the method includes the steps of fabricating a microhotplate (102) on silicon, fabricating a nanostructured sensor on the microhotplate (102) by growing of conductive nanotubes (110) or nanowires with metal catalyst and functionalising the conductive nanotubes or nanowires, wherein step the nanotubes (110) or nanowires are functionalised with metal oxides selected from a group consisting and not limited to tin oxide (SnO2), tungsten oxide (WOx), tantalum pent-oxide (Ta2O5), aluminium oxide (Al2O3) copper oxide (CuO), iron oxide (Fe2O3), titanium oxide (TiO), Neodymium Oxide (Nd2O3) and zinc oxide (ZnO). (Figure 2) |
| priorityDate | 2012-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.