http://rdf.ncbi.nlm.nih.gov/pubchem/patent/MY-181268-A

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filingDate 2015-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cddaf79899f2d103efd24b21b7e2406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a24cc0482418f62db2845086854cbab8
publicationDate 2020-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber MY-181268-A
titleOfInvention Composition and method for polishing memory hard disks
abstract The invention provides a chemical-mechanical polishing composition containing aluminate-modified silica particles, a polyacrylamide, a heterocyclic film-forming agent, and water. The invention also provides a method of chemically-mechanically polishing a substrate, especially a nickel-phosphorous substrate, by contacting a substrate with a polishing pad and the chemical-mechanical polishing composition, moving the polishing pad and the polishing composition relative to the substrate, and abrading at least a portion of the substrate to polish the substrate.
priorityDate 2014-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 29.