http://rdf.ncbi.nlm.nih.gov/pubchem/patent/MY-146528-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2401-90 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-185 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-00 |
| filingDate | 2007-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b336f07a9a89752e5dde21c2b0e0b8f |
| publicationDate | 2012-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | MY-146528-A |
| titleOfInvention | Repairing and restoring strength of etch-damaged low-k dielectric materials |
| abstract | A PROCESS OF REPAIRING A PLASMA ETCHED LOW-K DIELECTRIC MATERIAL HAVING SURFACE-BOUND SILANOL GROUPS INCLUDES EXPOSING AT LEAST ONE SURFACE OF THE DIELECTRIC MATERIAL TO (A) A CATALYST SO AS TO FORM HYDROGEN BONDS BETWEEN THE CATALYST AND THE SURFACE-BOUND SILANOL GROUPS OBTAINING A CATALYTIC INTERMEDIARY THAT REACTS WITH THE SILANE CAPPING AGENT SO AS TO FORM SURFACE-BOUND SILANE COMPOUNDS, OR (B) A SOLUTION COMPRISING A SUPERCRITICAL SOLVENT, A CATALYST, AND A SILANE CAPPING AGENT SO AS TO FORM HYDROGEN BONDS BETWEEN A CATALYST AND THE SURFACE-BOUND SILANOL GROUPS OBTAINING A CATALYTIC INTERMEDIARY THAT REACTS WITH THE SILANE CAPPING AGENT SO AS TO FORM SURFACE-BOUND SILANE COMPOUNDS. HORIZONTAL NETWORKS CAN BE FORMED BETWEEN ADJACENT SURFACE-BOUND SILANE COMPOUNDS. THE DIELECTRIC MATERIAL CAN BE FURTHER TREATED WITH AN ORGANIC ACID SO AS TO CATALYZE A HYDROLYTIC REACTION WITH ALKOXY GROUPS ON THE SURFACE-BOUND SILANE COMPOUNDS FORMING SILANOL GROUPS THAT CAN BE CONDENSED VIA HEAT TO REMOVE WATER AS A BYPRODUCT. |
| priorityDate | 2006-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.